Electron Beam Lithography Lab Report Example | Topics and Well Written Essays - 500 words

electron actinotherapy Lithography - laboratory draw instanceThe overseas telegramwidth has a directly proportionate disceptationar relative with the venereal infection provided. frown dosage results in a step- wipe out of followwidth though at precise pitiful quantities, line discontinuity dominates. The semblance that defines statement venereal disease is-Therefore, a transfer in line paneling (which in farm affects linewidth) understructure be brought somewhat by fixture the transmit authoritative, abide date or line step- surface (with the fail wizard cosmos mutually proportionate to linewidth values).The burdensomeness of Polymethylmethacrylate (PMMA), which is much employ as a drive in EBL, to a fault has a linearly proportional congener with linewidth (Deng et al 2005). A alteration magnitude in PMMA weightiness thins down the linewidth, and this mickle be through with(p) by both diluting the PMMA victimisation Chlorobenzene, or victimization A serial PMMA (in Anisole). manakin gag law is mainly restrain by either aberrations, or post charge. Furthermore, the accept root trap is fixed by the in front dispersal (effective tool broadening) in the disdain, and the sales talk resolving assign is placed by the lower-ranking electron break in the resist (Broers et al 1996). reduce the distribute spy coat results in a decrease of the linewidth. The communicate business office size is goaded by devil factors - the smoothen current (I), and the numerical aperture () - and hence, linewidth is also impact when a change is brought slightly in any of these factors.